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Passivation of phosphorus emitters by silicon oxidation prior to silicon nitride deposition using nitric acid

  • Donghwan KIM
제목
Passivation of phosphorus emitters by silicon oxidation prior to silicon nitride deposition using nitric acid
저자
Donghwan KIM
학회명
APCPST & SPSM 2010
개최국가
대한민국
학회 개최일
2010-07-04 ~ 2010-07-08

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