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Neural network modeling of breakdown field of low temperature silicon nitride deposited by inner two parallel coil ICPCVD
- 제목
- Neural network modeling of breakdown field of low temperature silicon nitride deposited by inner two parallel coil ICPCVD
- 저자
- PARK KANG-BAK
- 발행일
- 2012-07-04
- 학회명
- ICMAP2012
- 개최국가
- 대한민국
- 학회 개최일
- 2012-07-04 ~ 2012-07-06