Period-chirped gratings fabricated by laser interference lithography with a concave Lloyd's mirror

초록

We developed a laser interference lithography (LIL) system for fabrication of period-chirped gratings, which would be useful for sophisticated optical components. Despite its simplicity, the developed LIL system, based on a Lloyd's mirror interferometer with a cylindrically concave mirror, can generate chirped gratings, yet over a large area at high throughput owing to the nature of LIL. We have derived exact theoretical equations needed for system design, built the LIL system, and subsequently realized period-chirped gratings. A fabricated sample whose center period is Lambda approximate to 600 nm exhibits a continuous period variation of Delta Lambda = 92 nm across 17 mm width. (C) 2016 Optical Society of America

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