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Atomic Layer Deposition of Lanthanum Oxide(La2O3) Thin Film on Si(100) Substrate and Electrical Characterization

  • Kim, Byong-Ho
제목
Atomic Layer Deposition of Lanthanum Oxide(La2O3) Thin Film on Si(100) Substrate and Electrical Characterization
저자
Kim, Byong-Ho
학회명
한국진공학회
개최지
고려대학교
학회 개최일
2005-02-15 ~ 2005-02-16

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