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Electrical Properties of E-Beam Exposed Silicon Dioxides and Their Application to Nano-Devices

  • Hwang, Sung Woo
제목
Electrical Properties of E-Beam Exposed Silicon Dioxides and Their Application to Nano-Devices
저자
Hwang, Sung Woo
학회명
International Microprocess and Nanotechnology Conference (MNC '98) Digest of Papers
개최지
International Microprocess and Nanotechnology Conference (MNC '98) Digest of Papers
학회 개최일
1998-07-01

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