Anodic Bonding Technique for Silicon -to-ITO coated Glass Bonding

  • Sung, Man Young
제목
Anodic Bonding Technique for Silicon -to-ITO coated Glass Bonding
저자
Sung, Man Young
학회명
SPIE's 4th Annual Symposium on Smart Structure and Materials
개최지
SPIE's 4th Annual Symposium on Smart Structure and Materials
학회 개최일
1997-03-01