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Fabrication method of hole pattern SiO2 without etching using AZ positive photoresist for bottom up GaN-based nano LED
Fabrication method of hole pattern SiO2 without etching using AZ positive photoresist for bottom up GaN-based nano LED
- 제목
- Fabrication method of hole pattern SiO2 without etching using AZ positive photoresist for bottom up GaN-based nano LED
- 제목 (타언어)
- Fabrication method of hole pattern SiO2 without etching using AZ positive photoresist for bottom up GaN-based nano LED
- 저자
- BYUN, Dong Jin
- 발행일
- 2021-11-25
- 학회명
- 2021년도 한국재료학회 추계학술대회
- 개최국가
- 대한민국
- 학회 개최일
- 2021-11-24 ~ 2021-11-26