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Effect of Hydrogen Addition on the Residual Stress of Cubic Boron Nitride Thin Film Depositited by UBM Sputtering Method
- 제목
- Effect of Hydrogen Addition on the Residual Stress of Cubic Boron Nitride Thin Film Depositited by UBM Sputtering Method
- 저자
- Huh, Joo Youl
- 발행일
- 2012-04-26
- 학회명
- International Conference on Metallurgical Coatings and Thin Films2012
- 개최국가
- 미국
- 학회 개최일
- 2012-04-23 ~ 2012-04-27