Effects of He+, Ar+ and Xe+-ion-implanted sapphire(0001) substrates for GaN epilayers

Effects of He+, Ar+ and Xe+-ion-implanted sapphire(0001) substrates for GaN epilayers
제목
Effects of He+, Ar+ and Xe+-ion-implanted sapphire(0001) substrates for GaN epilayers
제목 (타언어)
Effects of He+, Ar+ and Xe+-ion-implanted sapphire(0001) substrates for GaN epilayers
저자
BYUN, Dong Jin
발행일
2007-02-01
학회명
ICDL 2007 Proceedings of The 1st International Conference on Display LEDs
개최국가
대한민국
학회 개최일
2007-01-30 ~ 2007-02-02