ScholarWorks@고려대학교

상세 보기

A Study on the Fabrication of SOI Wafer Using Silicon Surface Activated by Hydrogen Plasma

  • Sung, Man Young
제목
A Study on the Fabrication of SOI Wafer Using Silicon Surface Activated by Hydrogen Plasma
저자
Sung, Man Young
학회명
KIEE Summer Annual Conference '99

ScholarWorks@고려대학교

02841 서울특별시 성북구 안암로 145 Tel. 02-3290-2963

COPYRIGHT © 고려대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.