Fabrication of nano-hole array patterns on transparent conducting oxide layer using thermally curable nanoimprint lithography

제목
Fabrication of nano-hole array patterns on transparent conducting oxide layer using thermally curable nanoimprint lithography
저자
Lee, Heon
학회명
MNE 2007
개최지
Copenhagen Denmark
학회 개최일
2007-09-23 ~ 2007-09-26