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The effects of thermal treatment and Ge contents on interfacial properties of ZrO2 thin films on SiGe layers

  • CHOI, In-Hoon
제목
The effects of thermal treatment and Ge contents on interfacial properties of ZrO2 thin films on SiGe layers
저자
CHOI, In-Hoon
발행일
2005-11-01
학회명
DPS

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