Experimental analysis of the process of anodic bonding using an evaporated glass layer

제목
Experimental analysis of the process of anodic bonding using an evaporated glass layer
저자
Ju, Byeongkwon
학회명
MRS 1996 Fall Meeting [MRS Symp.Proc
학회 개최일
1996-12-10 ~ 1996-12-10