Evaluation of Electrical Properties and Residual Stress for PZT (52/48) Films by Sol-gel Routes with Raman Spectroscopy

  • PARK, JUNG HO
제목
Evaluation of Electrical Properties and Residual Stress for PZT (52/48) Films by Sol-gel Routes with Raman Spectroscopy
저자
PARK, JUNG HO
학회명
Integrated Ferroelectrics, The 15th International Symposium on Intergrated Ferroelectrics
학회 개최일
2003-03-09 ~ 2003-03-12