Influence of oxygen partial pressure in In-Sn-Ga-O thin-film transistors at a low temperature

Oh, Changyong; Jang, Hyunjae; Kim, Hyeong Wook; Jung, Hyunjae; Park, Hyungryul; Cho, Johann; Kim, Bo Sung

doi:10.1016/j.jallcom.2019.07.091

상세 보기

Influence of oxygen partial pressure in In-Sn-Ga-O thin-film transistors at a low temperature

Oh, Changyong;
Jang, Hyunjae;
Kim, Hyeong Wook;
Jung, Hyunjae;
Park, Hyungryul;
... Kim, Bo Sung;
외 1명

Citations

WEB OF SCIENCE

36

Citations

SCOPUS

42

초록

We examined the electrical properties of low-temperature-processed top-gate In-Sn-Ga-O (ITGO) thin-film transistors (TFTs) by rf/dc-sputtering with different oxygen partial pressures (PO2). As PO2 changed from 0 to 50.0%, the ITGO TFT showed various electrical characteristics such as from conductor-like behavior to transfer curves with positive-shifted threshold voltages (Vth). The TFT at PO2 of 25.0% afforded the best performance, exhibiting field-effect mobility of 14.8 cm(2)V(-1)s(-1), Vth of 0.56 V, and subthreshold slope of 0.16 Vdec(-1) with reasonable electrical stability for gate bias stress. From various analysis techniques, we found that the TFT characteristics and the electrical stability strongly depended on the metal-oxygen surface states of the ITGO films influenced by PO2 during the sputtering process. (C) 2019 Elsevier B.V. All rights reserved.

키워드

In-Sn-Ga-O (ITGO); Thin-film transistor (TFT); Oxygen partial pressure; Low temperature; Sputtering; AMORPHOUS OXIDE SEMICONDUCTOR; CARRIER TRANSPORT; HIGH-PERFORMANCE

제목: Influence of oxygen partial pressure in In-Sn-Ga-O thin-film transistors at a low temperature

저자: Oh, Changyong; Jang, Hyunjae; Kim, Hyeong Wook; Jung, Hyunjae; Park, Hyungryul; Cho, Johann; Kim, Bo Sung

DOI: 10.1016/j.jallcom.2019.07.091

발행일: 2019-10-15

유형: Article

저널명: Journal of Alloys and Compounds

권: 805

페이지: 211 ~ 217