Anodic bonding technique for silicon-to-ITO coated glass bonding

제목
Anodic bonding technique for silicon-to-ITO coated glass bonding
저자
Ju, Byeongkwon
학회명
SPIE’s 4th Annual Symposium on Smart Structures and Materials
학회 개최일
1997-03-10 ~ 1997-03-10