Annealing-Free Fabrication of Amorphous IGZO TFTs via Magnetic Field Shielded Sputtering (MFSS) Process

제목
Annealing-Free Fabrication of Amorphous IGZO TFTs via Magnetic Field Shielded Sputtering (MFSS) Process
저자
Hong MunPyo
발행일
2012-07-09
학회명
ICMAP 2012 (The 5th International Conference on Microelectronics and Plasma Technology)
개최국가
대한민국
학회 개최일
2012-07-04 ~ 2012-07-06