Fabrication of 3D MEMS antenna array for infrared detector using novel UV-lithography apparatus, plastic micro machining and micro assembly technique

  • Pak, James Jungho
제목
Fabrication of 3D MEMS antenna array for infrared detector using novel UV-lithography apparatus, plastic micro machining and micro assembly technique
저자
Pak, James Jungho
학회명
Nanotech 2003; The nanotechnology conference and trade show
개최지
San Francisco, USA
학회 개최일
2003-02-23 ~ 2003-02-27