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- 제목
- Fabrication of 3D MEMS antenna array for infrared detector using novel UV-lithography apparatus, plastic micro machining and micro assembly technique
- 저자
- Pak, James Jungho
- 학회명
- Nanotech 2003; The nanotechnology conference and trade show
- 개최지
- San Francisco, USA
- 학회 개최일
- 2003-02-23 ~ 2003-02-27