Fabrication of 3D MEMS antenna array structure for uncooled IR sensor using MRPBI system and plastic micromachining

  • Pak, James Jungho
제목
Fabrication of 3D MEMS antenna array structure for uncooled IR sensor using MRPBI system and plastic micromachining
저자
Pak, James Jungho
학회명
The International Conference on Electrical Engineering 2002
개최지
Jeju Lotte Hotel, KOREA
학회 개최일
2002-07-07 ~ 2002-07-11