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A Study of AlN Buffer Layer by RF Sputtering on Patterned Sapphire Substrate
A Study of AlN Buffer Layer by RF Sputtering on Patterned Sapphire Substrate
- 제목
- A Study of AlN Buffer Layer by RF Sputtering on Patterned Sapphire Substrate
- 제목 (타언어)
- A Study of AlN Buffer Layer by RF Sputtering on Patterned Sapphire Substrate
- 저자
- BYUN, Dong Jin
- 발행일
- 2014-06-02
- 학회명
- The 5th International Conference on White LEDs and Solid State Lighting
- 개최국가
- 대한민국
- 학회 개최일
- 2014-06-02 ~ 2014-06-05