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Highly doped, highly crystalized nano-crystal embedded polymorphous silicon thin film deposited by using neutral beam assisted CVD at room temperature
- 제목
- Highly doped, highly crystalized nano-crystal embedded polymorphous silicon thin film deposited by using neutral beam assisted CVD at room temperature
- 저자
- Hong MunPyo
- 발행일
- 2012-07-04
- 학회명
- ICMAP 2012 (The 6th International Conference on Microelectronics and Plasma Technology)
- 개최국가
- 대한민국
- 학회 개최일
- 2012-07-04 ~ 2012-07-06