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Sawtooth Fingerd Comb Drive Actuator for Greater Displacement

  • Pak, James Jungho
제목
Sawtooth Fingerd Comb Drive Actuator for Greater Displacement
저자
Pak, James Jungho
학회명
제 13회 한국반도체학술대회
학회 개최일
2006-02-23 ~ 2006-02-24

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