Formation of GaN with Void on Patterned Sapphire Substrate by Carbonization of Photoresist

Formation of GaN with Void on Patterned Sapphire Substrate by Carbonization of Photoresist
제목
Formation of GaN with Void on Patterned Sapphire Substrate by Carbonization of Photoresist
제목 (타언어)
Formation of GaN with Void on Patterned Sapphire Substrate by Carbonization of Photoresist
저자
BYUN, Dong Jin
발행일
2017-11-23
학회명
ICAE 2017
개최국가
대한민국
학회 개최일
2017-11-21 ~ 2017-11-24