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Influence of Polymer Structure on E-Beam Lithography: Minimizing Line Edge Roughness with Bottlebrush Polymers
Influence of Polymer Structure on E-Beam Lithography: Minimizing Line Edge Roughness with Bottlebrush Polymers
- 제목
- Influence of Polymer Structure on E-Beam Lithography: Minimizing Line Edge Roughness with Bottlebrush Polymers
- 제목 (타언어)
- Influence of Polymer Structure on E-Beam Lithography: Minimizing Line Edge Roughness with Bottlebrush Polymers
- 저자
- Seungwoo Lee
- 발행일
- 2024-03-06
- 학회명
- 2024 American Physical Society (APS) March Meeting
- 개최국가
- 미국
- 학회 개최일
- 2024-03-04 ~ 2024-03-08