Fabrication of high TCR bolometric thin film based on low temperature annealling and its application to the surface micromachined uncooled microbolome

  • Shin Hyun Joon
제목
Fabrication of high TCR bolometric thin film based on low temperature annealling and its application to the surface micromachined uncooled microbolome
저자
Shin Hyun Joon
발행일
2003-02-01
학회명
ISAEM