GaN Template Fabrication on Trapezoid Patterned Sapphire Substrate using SOG Mask with Different Buffer Layers

GaN Template Fabrication on Trapezoid Patterned Sapphire Substrate using SOG Mask with Different Buffer Layers
제목
GaN Template Fabrication on Trapezoid Patterned Sapphire Substrate using SOG Mask with Different Buffer Layers
제목 (타언어)
GaN Template Fabrication on Trapezoid Patterned Sapphire Substrate using SOG Mask with Different Buffer Layers
저자
BYUN, Dong Jin
발행일
2018-11-08
학회명
2018년도 한국재료학회 추계학술대회
개최국가
대한민국
학회 개최일
2018-11-07 ~ 2018-11-09