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Study of Magnetic Field Shielded Sputtering Effect as a Room Temperature High Quality ITO Thin Film Deposition Process for Plastic Microelectronic Device
- 제목
- Study of Magnetic Field Shielded Sputtering Effect as a Room Temperature High Quality ITO Thin Film Deposition Process for Plastic Microelectronic Device
- 저자
- Hong MunPyo
- 학회명
- 2011 MRS SPRING MEETING
- 개최국가
- 미국
- 학회 개최일
- 2011-04-25 ~ 2011-04-29