Study of Magnetic Field Shielded Sputtering Effect as a Room Temperature High Quality ITO Thin Film Deposition Process for Plastic Microelectronic Device

제목
Study of Magnetic Field Shielded Sputtering Effect as a Room Temperature High Quality ITO Thin Film Deposition Process for Plastic Microelectronic Device
저자
Hong MunPyo
학회명
2011 MRS SPRING MEETING
개최국가
미국
학회 개최일
2011-04-25 ~ 2011-04-29