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Improvement of Room Temperature Processed High Quality TCO Thin Film Using the DC/RF Superimposed Magnetic Field Shielded Sputtering (MFSS) Process
- 제목
- Improvement of Room Temperature Processed High Quality TCO Thin Film Using the DC/RF Superimposed Magnetic Field Shielded Sputtering (MFSS) Process
- 저자
- Hong MunPyo
- 발행일
- 2011-11-28
- 학회명
- 2011 MRS Fall MEETING
- 개최국가
- 미국
- 학회 개최일
- 2011-11-27 ~ 2011-12-02