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A study on the mechanical and electrical properties of atomic and molecular layer deposited ZnO – zincone alloy thin films with change of molecular backbone structures
A study on the mechanical and electrical properties of atomic and molecular layer deposited ZnO – zincone alloy thin films with change of molecular backbone structures
- 제목
- A study on the mechanical and electrical properties of atomic and molecular layer deposited ZnO – zincone alloy thin films with change of molecular backbone structures
- 제목 (타언어)
- A study on the mechanical and electrical properties of atomic and molecular layer deposited ZnO – zincone alloy thin films with change of molecular backbone structures
- 저자
- Byoung-Ho Choi
- 발행일
- 2018-07-30
- 학회명
- ALD 2018 (18th International Conference on Atomic Layer Deposition)
- 개최국가
- 대한민국
- 학회 개최일
- 2018-07-29 ~ 2018-08-01