The Effects of Various Bottom Electrodes in MFM Structure on the Ferroelectric Properties of SrBi2Nb2O9 Thin Films Using RF Magnetron Sputtering

  • CHOI, In-Hoon
제목
The Effects of Various Bottom Electrodes in MFM Structure on the Ferroelectric Properties of SrBi2Nb2O9 Thin Films Using RF Magnetron Sputtering
저자
CHOI, In-Hoon
학회명
joint International Plasma Symposium of 6th APCPST, 15th SPSM, OS 2002 & 11th KAPRA
개최지
joint International Plasma Symposium of 6th APCPST, 15th SPSM, OS 2002 & 11th KAPRA
학회 개최일
2002-01-01