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High-Speed Capacitive Humidity Sensors Based on Polyimide Thin FilmsLocally Cured Using MEMS Microhotplate

  • Min Nam Ki
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High-Speed Capacitive Humidity Sensors Based on Polyimide Thin FilmsLocally Cured Using MEMS Microhotplate
저자
Min Nam Ki
학회명
APCOT 2008
개최국가
대만
학회 개최일
2008-06-10 ~ 2008-06-15

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