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New Approaches for Extremely High Doping and High Crystal Fraction in the Mixed Phase Nano-Crystal Silicon Thin Film by Near Room Temperature Deposition Process with Neutral Beam Assisted CVD
- 제목
- New Approaches for Extremely High Doping and High Crystal Fraction in the Mixed Phase Nano-Crystal Silicon Thin Film by Near Room Temperature Deposition Process with Neutral Beam Assisted CVD
- 저자
- Hong MunPyo
- 발행일
- 2013-02-06
- 학회명
- 제20회 한국반도체학술대회
- 개최지
- 웰리힐리파크
- 개최국가
- 대한민국
- 학회 개최일
- 2013-02-04 ~ 2013-02-06