Study on Hydrogen Passivation Behavior of Al2O3/SiNx Film and its Thermal Annealing Effect

Study on Hydrogen Passivation Behavior of Al2O3/SiNx Film and its Thermal Annealing Effect
제목
Study on Hydrogen Passivation Behavior of Al2O3/SiNx Film and its Thermal Annealing Effect
제목 (타언어)
Study on Hydrogen Passivation Behavior of Al2O3/SiNx Film and its Thermal Annealing Effect
저자
Hae-Seok LEE
발행일
2018-03-14
학회명
Global Photovoltaic Conference 2018
개최지
광주 (김대중 컨벤션센터)
개최국가
대한민국
학회 개최일
2018-03-14 ~ 2018-03-16