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Effects of CVD parameters on hardness and structural characteristics of TiN films

  • LEE, SEONG RAE
제목
Effects of CVD parameters on hardness and structural characteristics of TiN films
저자
LEE, SEONG RAE
학회명
제2회 한일 금속표면처리기술 세미나
학회 개최일
1987-10-13 ~ 1987-10-13

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