Development of a High Quality Nanolaminate Single Gas Barrier Layer by Neutral Beam Assisted Sputtering (NBAS) Process

제목
Development of a High Quality Nanolaminate Single Gas Barrier Layer by Neutral Beam Assisted Sputtering (NBAS) Process
저자
Hong MunPyo
발행일
2011-11-28
학회명
2011 MRS Fall MEETING
개최국가
미국
학회 개최일
2011-11-27 ~ 2011-12-02