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A low temperature direct bonding method using an electron-beam evaporated silicon-oxide interlayer
- 제목
- A low temperature direct bonding method using an electron-beam evaporated silicon-oxide interlayer
- 저자
- Ju, Byeongkwon
- 학회명
- MRS 1996 Fall Meeting [MRS Symp.Proc
- 학회 개최일
- 1996-12-10 ~ 1996-12-10