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Micromachined Accelerometer Fabricated by Merged Epitaxial Lateral Overgrowth of Silicon

  • Pak, James Jungho
제목
Micromachined Accelerometer Fabricated by Merged Epitaxial Lateral Overgrowth of Silicon
저자
Pak, James Jungho
학회명
센서기술학술대회 논문집
개최지
센서기술학술대회 논문집
학회 개최일
1996-11-09

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