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Fabrication of in-plane gated transistor with electron-beam lithography technique

  • PARK, JUNG HO
제목
Fabrication of in-plane gated transistor with electron-beam lithography technique
저자
PARK, JUNG HO
학회명
제4회 한국 반도체 학술대회 논문집
개최지
제4회 한국 반도체 학술대회 논문집
학회 개최일
1997-02-01

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