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New Types of Metal Alkoxides as ALD (Atomic Layer Deposition) Precursors to Some Oxides and Their Applications

  • Yunsoo Kim
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New Types of Metal Alkoxides as ALD (Atomic Layer Deposition) Precursors to Some Oxides and Their Applications
저자
Yunsoo Kim
학회명
IUVSTA Special Symposium
개최지
서울 (Sofitel Ambassador Hotel)
학회 개최일
2006-09-18 ~ 2006-09-19

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