Temperature Dependence of ZnO Growth Mechanism on Si(100) Substrate by Atomic Layer Deposition

Temperature Dependence of ZnO Growth Mechanism on Si(100) Substrate by Atomic Layer Deposition
제목
Temperature Dependence of ZnO Growth Mechanism on Si(100) Substrate by Atomic Layer Deposition
제목 (타언어)
Temperature Dependence of ZnO Growth Mechanism on Si(100) Substrate by Atomic Layer Deposition
저자
BYUN, Dong Jin
발행일
2018-11-08
학회명
The 5th Korea-Japan International Symposium on Materials Science and Technology 2018
개최국가
대한민국
학회 개최일
2018-11-07 ~ 2018-11-09