Fabrication of suspended bridge type resonator using laser interference lithography

Fabrication of suspended bridge type resonator using laser interference lithography
제목
Fabrication of suspended bridge type resonator using laser interference lithography
제목 (타언어)
Fabrication of suspended bridge type resonator using laser interference lithography
저자
Rieh, Jae-Sung
발행일
2012-10-29
학회명
European Microwoave Integrated Circutis Conference (EuMIC)
개최국가
네덜란드
학회 개최일
2012-10-29 ~ 2012-10-30