Effective Surface Passivation of Crystalline Silicon by Aluminum Oxide with Thermal Atomic Layer Deposition

Effective Surface Passivation of Crystalline Silicon by Aluminum Oxide with Thermal Atomic Layer Deposition
제목
Effective Surface Passivation of Crystalline Silicon by Aluminum Oxide with Thermal Atomic Layer Deposition
제목 (타언어)
Effective Surface Passivation of Crystalline Silicon by Aluminum Oxide with Thermal Atomic Layer Deposition
저자
Kang Yoon Mook
발행일
2019-05-16
학회명
한국재료학회 춘계학술대회
개최국가
대한민국
학회 개최일
2019-05-15 ~ 2019-05-17