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Effective Surface Passivation of Crystalline Silicon by Aluminum Oxide with Thermal Atomic Layer Deposition
Effective Surface Passivation of Crystalline Silicon by Aluminum Oxide with Thermal Atomic Layer Deposition
- 제목
- Effective Surface Passivation of Crystalline Silicon by Aluminum Oxide with Thermal Atomic Layer Deposition
- 제목 (타언어)
- Effective Surface Passivation of Crystalline Silicon by Aluminum Oxide with Thermal Atomic Layer Deposition
- 저자
- Kang Yoon Mook
- 발행일
- 2019-05-16
- 학회명
- 한국재료학회 춘계학술대회
- 개최국가
- 대한민국
- 학회 개최일
- 2019-05-15 ~ 2019-05-17