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Effect of Excimer Laser Annealing on Optical Properties of GaN Films Deposited by R.F. Magnetron Sputtering

  • Sung, Man Young
제목
Effect of Excimer Laser Annealing on Optical Properties of GaN Films Deposited by R.F. Magnetron Sputtering
저자
Sung, Man Young
학회명
2001 MRS Fall(conference) Meeting 2001
개최지
2001 MRS Fall(conference) Meeting 2001
학회 개최일
2001-11-26

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