Fabrication of oxidation-free contacts to nanopatterned Permalloy structures

  • Kim, Hye-Young
  • Lee, Kang Ho
  • Kim, Gyu-Tae
  • Kang, Woun
  • Lee, Kyung-Jin
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키워드

contact resistanceelectrical contactselectrodesmagnetoelectronicsmaterials preparationnanofabricationnanopatterningnanowiresPermalloyMAGNETORESISTANCE
제목
Fabrication of oxidation-free contacts to nanopatterned Permalloy structures
저자
Kim, Hye-YoungLee, Kang HoKim, Gyu-TaeKang, WounLee, Kyung-Jin
DOI
10.1116/1.3263264
발행일
2009-11
유형
Editorial Material
저널명
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
27
6
페이지
2487 ~ 2489