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New approaches for highly doped polymorphous silicon thin film with homogeneously embedded nano-crystalline by using neutral beam assisted chemical vapor deposition system at near room temperature
- 제목
- New approaches for highly doped polymorphous silicon thin film with homogeneously embedded nano-crystalline by using neutral beam assisted chemical vapor deposition system at near room temperature
- 저자
- Hong MunPyo
- 발행일
- 2012-01-31
- 학회명
- ITC 2012 ？ 8th International Thin-Film Transistor Conference
- 개최지
- Lisbon, Portugal
- 개최국가
- 포르투갈
- 학회 개최일
- 2012-01-30 ~ 2012-01-31