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- 제목
- FABRICATION AND CHARACTERIZATION OF Pt/SrBi2Ta2O9(SBT)/CeO2/Si METAL FERROELECTRIC INSULATOR SEMICONDUCTOR FIELD EFFECT TRANSISTOR(MFISFET) MEMORY BY USING THE INDUCTIVELY COUPLED PLASMA REACTIVE ION ETCHING (ICPRIE) PROCESS
- 저자
- PARK, JUNG HO
- 학회명
- 1st International Meeting on applied Physics (APHYS-2003)
- 개최지
- Badajoz, Spain
- 학회 개최일
- 2003-10-13 ~ 2003-10-18