Aluminum Nanotransmission Lines with No Grain Boundaries and No Surface Roughness

초록

Ideal metallic interconnects and transmission lines should be free of grain boundaries and surface roughness. In this study, we demonstrated microwave transmission through transmission lines fabricated from single-crystalline aluminum nanowires (AlNWs) with no surface roughness and no grain boundaries. These nanotransmission lines showed an intrinsic loss of 3 dB at the frequency of 140 GHz. The extracted parameters from the measured microwave data exhibited resistance values consistent with the ideal DC resistivity of pure aluminum. (C) 2011 The Japan Society of Applied Physics