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The Effect of HiPIMS Conditions on Physical Properties of Carbon Thin Films
The Effect of HiPIMS Conditions on Physical Properties of Carbon Thin Films
- 제목
- The Effect of HiPIMS Conditions on Physical Properties of Carbon Thin Films
- 제목 (타언어)
- The Effect of HiPIMS Conditions on Physical Properties of Carbon Thin Films
- 저자
- BYUN, Dong Jin
- 발행일
- 2018-08-21
- 학회명
- IUMRS-ICEM 2018
- 개최국가
- 대한민국
- 학회 개최일
- 2018-08-19 ~ 2018-08-24