Stress release effect of AlGaN with AlN/AlGaN Interlayer Grown by MOCVD

Stress release effect of AlGaN with AlN/AlGaN Interlayer Grown by MOCVD
제목
Stress release effect of AlGaN with AlN/AlGaN Interlayer Grown by MOCVD
제목 (타언어)
Stress release effect of AlGaN with AlN/AlGaN Interlayer Grown by MOCVD
저자
BYUN, Dong Jin
발행일
2019-10-31
학회명
2019년도 한국재료학회 추계학술대회
개최국가
대한민국
학회 개최일
2019-10-30 ~ 2019-11-01