Growth and characterization of a multi-dimensional ZnO hybrid structure on a glass substrate by using metal organic chemical vapor deposition

초록

A multi-dimensional zinc oxide (ZnO) hybrid structure was successfully grown on a glass substrate by using metal organic chemical vapor deposition (MOCVD). The ZnO hybrid structure was composed of nanorods grown continuously on the ZnO film without any catalysts. The growth mode could be changed from a two-dimensional (2D) film to one-dimensional (1D) nanorods by simply controlling the substrate's temperature. The ZnO with a hybrid structure showed improved electrical and optical properties. The ZnO hybrid structure grown by using MOCVD has excellent potential for applications in opto-electronic devices and solar cells as anti-reflection coatings (ARCs), transparent conductive oxides (TCOs) and transparent thin-film transistors (TTFTs).

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